AI-driven process control for micro/nano-fabrication of sustainable devices: Technologies, challenges, and future directions
Crossref DOI link: https://doi.org/10.30574/ijsra.2026.18.3.0555
Published Online: 2026-03-31
Update policy: https://doi.org/10.30574/ijsra.ourcrossmarkpolicy
Ahad, Md Fazly Rabbi
Sultana, Jakiya
Islam, Md. Ariful
Nayeem, Md. Habibur Rahman
