Oka, Ryusei
Yamamoto, Keisuke
Akamine, Hiroshi
Wang, Dong
Nakashima, Hiroshi
Hishiki, Shigeomi
Kawamura, Keisuke
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: High interfacial quality metal-oxide-semiconductor capacitor on (111) oriented 3C-SiC with Al2O3 interlayer and its internal charge analysis
Copyright information: © 2020 The Japan Society of Applied Physics
Publication dates
Date received: 2019-09-30
Date accepted: 2020-01-07
Online publication date: 2020-02-28