Oka, Ryusei
Yamamoto, Keisuke
Akamine, Hiroshi
Wang, Dong
Nakashima, Hiroshi
Hishiki, Shigeomi
Kawamura, Keisuke
Article Title: High interfacial quality metal-oxide-semiconductor capacitor on (111) oriented 3C-SiC with Al 2 O 3 interlayer and its internal charge analysis
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2020 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2019-09-30
Date Accepted: 2020-01-07
Online publication date: 2020-02-28