Galkin, Nikolay G. https://orcid.org/0000-0003-4127-2988
Galkin, Konstantin N.
Tupkalo, Andrei V.
Chusovitin, Evgenii A.
Goroshko, Dmitrii L.
Fogarassi, Z.
Pecz, B.
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Semitransparent and conductive CaSi2 films for silicon device applications
Copyright information: © 2020 The Japan Society of Applied Physics
Publication dates
Date received: 2019-08-28
Date accepted: 2020-01-14
Online publication date: 2020-03-05