Murao, Yoshiki
Nitta, Noriko
Suzuki, Katsuyori
Funding for this research was provided by:
"Nanotechnology Platform" of the Ministry of Education, Culture, Sports, Science and Technology (NPS17009 (Type2))
Article Title: Fabrication of ordered nanostructures on the Ge surface using electron-beam lithography and ion beam irradiation
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2020 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2019-12-07
Date Accepted: 2020-01-26
Online publication date: 2020-02-17