Ohmi, Shun-Ichiro
Horiuchi, Yusuke
Kudoh, Sohya
Article Title: Improvement of Hf-based metal/oxide/nitride/oxide/Si nonvolatile memory characteristics by Si surface atomically flattening
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2020 The Japan Society of Applied Physics
Publication dates
Date Received: 2019-10-02
Date Accepted: 2020-01-23
Online publication date: 2020-02-28