Kawano, Masahiro
Minematsu, Ryo
Haraguchi, Tomohiro
Fukuyama, Atsuhiko
Suzuki, Hidetoshi
Article Title: Growth and evaluation of GaAsN films with different N distribution grown by atomic layer epitaxy method
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2020 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2019-10-01
Date Accepted: 2020-02-03
Online publication date: 2020-02-28