Asamura, Kazuto
Nagasawa, Sumito
Article Title: MEMS fabrication of compliant sheet for micro hexapod robots
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2020 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2019-12-04
Date Accepted: 2020-02-07
Online publication date: 2020-03-09