Asamura, Kazuto
Nagasawa, Sumito
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: MEMS fabrication of compliant sheet for micro hexapod robots
Copyright information: © 2020 The Japan Society of Applied Physics
Publication dates
Date received: 2019-12-04
Date accepted: 2020-02-07
Online publication date: 2020-03-09