Koharada, Masato
Yokogawa, Ryo
Sawamoto, Naomi
Yoshioka, Kazutoshi
Ogura, Atsushi
Article Title: Stress evaluation induced by wiggling silicon nitride fine pattern using Raman spectroscopy
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2020 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2019-12-04
Date Accepted: 2020-03-09
Online publication date: 2020-04-06