Tanigawa, Haruki
Matsuura, Kentaro
Muneta, Iriya
Hoshii, Takuya https://orcid.org/0000-0002-2873-8715
Kakushima, Kuniyuki
Tsutsui, Kazuo
Wakabayashi, Hitoshi
Article Title: Enhancement-mode accumulation capacitance–voltage characteristics in TiN/ALD-Al2O3/sputtered-MoS2 top-gated stacks
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2020 The Japan Society of Applied Physics
Publication dates
Date Received: 2019-12-29
Date Accepted: 2020-03-13
Online publication date: 2020-04-01