Shibayama, Shigehisa
Nagano, Jotaro
Sakashita, Mitsuo
Nakatsuka, Osamu https://orcid.org/0000-0002-5198-0737
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Ferroelectric phase formation for undoped ZrO2 thin films by wet O2 annealing
Copyright information: © 2020 The Japan Society of Applied Physics
Publication dates
Date received: 2019-12-30
Date accepted: 2020-03-18
Online publication date: 2020-04-07