Shibayama, Shigehisa
Nagano, Jotaro
Sakashita, Mitsuo
Nakatsuka, Osamu https://orcid.org/0000-0002-5198-0737
Article Title: Ferroelectric phase formation for undoped ZrO 2 thin films by wet O 2 annealing
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2020 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2019-12-30
Date Accepted: 2020-03-18
Online publication date: 2020-04-07