Kamada, Yoichi
Ozaki, Shiro
Yaita, Junya
Yamada, Atsushi
Ohki, Toshihiro
Minoura, Yuichi
Kumazaki, Yusuke
Okamoto, Naoya
Makiyama, Kozo
Nakamura, Norikazu
Kotani, Junji
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Thermally stable and low trap density SiNx/AlON bi-layer structure for AlGaN/GaN MIS-HEMTs
Copyright information: © 2020 The Japan Society of Applied Physics
Publication dates
Date received: 2019-11-26
Date accepted: 2020-03-23
Online publication date: 2020-04-09