Kamada, Yoichi
Ozaki, Shiro
Yaita, Junya
Yamada, Atsushi
Ohki, Toshihiro
Minoura, Yuichi
Kumazaki, Yusuke
Okamoto, Naoya
Makiyama, Kozo
Nakamura, Norikazu
Kotani, Junji
Article Title: Thermally stable and low trap density SiN x /AlON bi-layer structure for AlGaN/GaN MIS-HEMTs
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2020 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2019-11-26
Date Accepted: 2020-03-23
Online publication date: 2020-04-09