Ogawa, Shuichi https://orcid.org/0000-0002-6625-7904
Yoshigoe, Akitaka
Tang, Jaiyi
Sekihata, Yuki
Takakuwa, Yuji
Journal title: Japanese Journal of Applied Physics
Article type: rev
Article title: Roles of strain and carrier in silicon oxidation
Copyright information: © 2020 The Japan Society of Applied Physics
Publication dates
Date received: 2020-02-20
Date accepted: 2020-03-24
Online publication date: 2020-04-24