Matsui, Takuto
Tatsumi, Kosuke
Kawashima, Tomohiro
Murakami, Yoshinobu
Hozumi, Naohiro
Matsumoto, Toru
Article Title: Frequency determination in nondestructive test of semiconductor devices with ultrasound heating
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2020 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2019-12-03
Date Accepted: 2020-04-30
Online publication date: 2020-05-15