Mori, Keiichiro
Samata, Shuichi
Mitsugi, Noritomo
Teramoto, Akinobu https://orcid.org/0000-0002-4655-9403
Kuroda, Rihito https://orcid.org/0000-0001-7812-3084
Suwa, Tomoyuki
Hashimoto, Keiichi
Sugawa, Shigetoshi
Article Title: Influence of silicon wafer surface roughness on semiconductor device characteristics
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2020 The Japan Society of Applied Physics
Publication dates
Date Received: 2019-12-15
Date Accepted: 2020-05-08
Online publication date: 2020-05-26