Nakayama, Keita
Masuda, Sho
Satoh, Nobuo
Yamamoto, Hidekazu
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Evaluation of silicon carbide Schottky barrier diode within guard ring by multifunctional scanning probe microscopy
Copyright information: © 2020 The Japan Society of Applied Physics
Publication dates
Date received: 2020-01-15
Date accepted: 2020-05-25
Online publication date: 2020-06-15