Hanya, Yuki
Nakamura, Ryusuke https://orcid.org/0000-0002-6238-704X
Okugawa, Masayuki https://orcid.org/0000-0002-6844-6856
Ishimaru, Manabu
Oohata, Goro
Yasuda, Hidehiro
Article Title: Effects of hydrogen on structure and crystallization behavior of sputter-deposited amorphous germanium films
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2020 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-04-22
Date Accepted: 2020-06-15
Online publication date: 2020-07-02