Ikari, Yuta
Okamoto, Kazumasa https://orcid.org/0000-0002-5207-5309
Konda, Akihiro
Kozawa, Takahiro https://orcid.org/0000-0002-0124-5240
Tamura, Takao
Article Title: Heating effect of the radiation chemistry of polyhydroxystyrene-type chemically amplified resists
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2020 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-06-01
Date Accepted: 2020-07-20
Online publication date: 2020-08-10