Ikari, Yuta
Okamoto, Kazumasa https://orcid.org/0000-0002-5207-5309
Konda, Akihiro
Kozawa, Takahiro https://orcid.org/0000-0002-0124-5240
Tamura, Takao
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Heating effect of the radiation chemistry of polyhydroxystyrene-type chemically amplified resists
Copyright information: © 2020 The Japan Society of Applied Physics
Publication dates
Date received: 2020-06-01
Date accepted: 2020-07-20
Online publication date: 2020-08-10