Murase, M.
Yoshimura, T.
Fujimura, N.
Article Title: Combinatorial study of the phase development of sputtered Pb(Zr,Ti)O 3 films
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2020 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-06-23
Date Accepted: 2020-09-02
Online publication date: 2020-09-17