Murase, M.
Yoshimura, T.
Fujimura, N.
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Combinatorial study of the phase development of sputtered Pb(Zr,Ti)O3 films
Copyright information: © 2020 The Japan Society of Applied Physics
Publication dates
Date received: 2020-06-23
Date accepted: 2020-09-02
Online publication date: 2020-09-17