Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Microstructure and electrical property of tantalum oxynitride thin films prepared using high-power impulse reactive magnetron sputtering
Copyright information: © 2020 The Japan Society of Applied Physics
Publication dates
Date received: 2020-06-28
Date accepted: 2020-10-12
Online publication date: 2020-10-28