Takagi, Shigeyuki
Chikata, Takumi
Sekine, Makoto
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Plasma simulation for dual-frequency capacitively coupled plasma incorporating gas flow simulation
Copyright information: © 2020 The Japan Society of Applied Physics
Publication dates
Date received: 2020-04-13
Date accepted: 2020-10-14
Online publication date: 2020-10-30