Takagi, Shigeyuki
Chikata, Takumi
Sekine, Makoto
Article Title: Plasma simulation for dual-frequency capacitively coupled plasma incorporating gas flow simulation
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2020 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-04-13
Date Accepted: 2020-10-14
Online publication date: 2020-10-30