Koga, Yoshihiro
Kurita, Kazunari
Article Title: Floating zone silicon wafer bonded to Czochralski silicon substrate by surface-activated bonding at room temperature for infrared complementary metal-oxide-semiconductor image sensors
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2020 The Japan Society of Applied Physics
Publication dates
Date Received: 2020-06-04
Date Accepted: 2020-11-24
Online publication date: 2020-12-15