Akazawa, Masamichi
Kamoshida, Ryo
Murai, Shunta
Kachi, Tetsu
Uedono, Akira
Article Title: Low-temperature annealing behavior of defects in Mg-ion-implanted GaN studied using MOS diodes and monoenergetic positron beam
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2020 The Japan Society of Applied Physics
Publication dates
Date Received: 2020-08-18
Date Accepted: 2020-11-29
Online publication date: 2020-12-15