Mochizuki, Kazuhiro https://orcid.org/0000-0002-8687-2568
Mishima, Tomoyoshi https://orcid.org/0000-0002-1332-1351
Article Title: Analysis of surface diffusion of carbon- and nitrogen-containing molecules during homoepitaxial growth of 4H-SiC (0001) under silicon-rich conditions
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2020 The Japan Society of Applied Physics
Publication dates
Date Received: 2020-11-15
Date Accepted: 2020-12-02
Online publication date: 2020-12-15