Miyoshi, Yasufumi
Ishikawa, Kenji
Sekine, Makoto
Hori, Masaru
Tatsumi, Tetsuya
Article Title: Reduction in photon-induced interface defects by optimal pulse repetition rate in the pulse-modulated inductively coupled plasma
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2020 The Japan Society of Applied Physics
Publication dates
Date Received: 2020-09-21
Date Accepted: 2020-12-06
Online publication date: 2020-12-29