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Spectro-ellipsometric modeling and optimization of two-dimensional Ge layer and three-dimensional Ge dot/island structures on SiO <sub>2</sub> substrates

Crossref DOI link: https://doi.org/10.35848/1347-4065/abd36b

Published Online: 2021-01-07

Published Print: 2021-01-01

Update policy: https://doi.org/10.1088/crossmark-policy

Authors

Akazawa, Housei
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Article Title: Spectro-ellipsometric modeling and optimization of two-dimensional Ge layer and three-dimensional Ge dot/island structures on SiO 2 substrates

Journal Title: Japanese Journal of Applied Physics

Article Type: paper

Copyright Information: © 2021 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.

Publication dates

Date Received: 2020-10-06

Date Accepted: 2020-12-13

Online publication date: 2021-01-07

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