Igarashi, Satoshi
Mochizuki, Yusuke
Tanigawa, Haruki
Hamada, Masaya https://orcid.org/0000-0002-5830-5283
Matsuura, Kentaro
Muneta, Iriya
Kakushima, Kuniyuki
Tsutsui, Kazuo
Wakabayashi, Hitoshi
Article Title: Self-aligned-TiSi2 bottom contact with APM cleaning and post-annealing for sputtered-MoS2 film
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2021 The Author(s). Published on behalf of The Japan Society of Applied Physics by IOP Publishing Ltd
Publication dates
Date Received: 2020-10-16
Date Accepted: 2020-12-18
Online publication date: 2021-01-11