Imai, Shinya
Hamada, Takuya
Hamada, Masaya https://orcid.org/0000-0002-5830-5283
Shirokura, Takanori https://orcid.org/0000-0002-9030-7131
Muneta, Iriya
Kakushima, Kuniyuki
Tatsumi, Tetsuya
Tomiya, Shigetaka
Tsutsui, Kazuo
Wakabayashi, Hitoshi
Article Title: Importance of crystallinity improvement in MoS2 film by compound sputtering even followed by post sulfurization
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2021 The Author(s). Published on behalf of The Japan Society of Applied Physics by IOP Publishing Ltd
Publication dates
Date Received: 2020-10-16
Date Accepted: 2021-01-15
Online publication date: 2021-02-03