Yoshiya, Yuki
Hoshi, Takuya
Sugiyama, Hiroki https://orcid.org/0000-0002-6301-857X
Matsuzaki, Hideaki
Article Title: Impact of selective thermal etching in mixed H2/NH3 atmosphere on crystal quality of AlGaN/GaN heterostructures
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2021 The Japan Society of Applied Physics
Publication dates
Date Received: 2020-10-16
Date Accepted: 2021-01-25
Online publication date: 2021-02-18