Shi, Zhitian http://orcid.org/0000-0003-0539-219X
Jefimovs, Konstantins http://orcid.org/0000-0002-1888-0777
Romano, Lucia http://orcid.org/0000-0002-7696-7643
Stampanoni, Marco
Article Title: Optimization of displacement Talbot lithography for fabrication of uniform high aspect ratio gratings
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2021 The Japan Society of Applied Physics
Publication dates
Date Received: 2020-11-19
Date Accepted: 2021-02-01
Online publication date: 2021-02-22