Eriguchi, Koji https://orcid.org/0000-0003-1485-5897
Funding for this research was provided by:
Japan Society for the Promotion of Science ((B) 20360329)
Article Title: Characterization techniques of ion bombardment damage on electronic devices during plasma processing—plasma process-induced damage
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2021 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2021-01-12
Date Accepted: 2021-02-08
Online publication date: 2021-03-23