Park, Kyung Eun
Kamata, Hideki
Ohmi, Shun-ichiro
Article Title: N2 gas flow rate dependence on the high-k LaB x N y thin film characteristics formed by RF sputtering for floating-gate memory applications
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2021 The Japan Society of Applied Physics
Publication dates
Date Received: 2020-10-16
Date Accepted: 2021-02-12
Online publication date: 2021-03-01