Kataoka, Junji
Tsai, Sung-Lin
Hoshii, Takuya https://orcid.org/0000-0002-2873-8715
Wakabayashi, Hitoshi
Tsutsui, Kazuo
Kakushima, Kuniyuki
Article Title: A possible origin of the large leakage current in ferroelectric Al 1− x Sc x N films
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2021 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2021-01-23
Date Accepted: 2021-02-14
Online publication date: 2021-02-25