Aota, T.
Hayasaka, A.
Makabe, I.
Yoshida, S.
Gotow, T. https://orcid.org/0000-0001-9052-2950
Miyamoto, Y. https://orcid.org/0000-0002-2676-7264
Article Title: Wet etching for isolation of N-polar GaN HEMT structure by electrodeless photo-assisted electrochemical reaction
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2021 The Japan Society of Applied Physics
Publication dates
Date Received: 2020-11-29
Date Accepted: 2021-02-18
Online publication date: 2021-03-08