Workie, Temesgen Bailie https://orcid.org/0000-0003-2093-5877
Wu, Ting
Bao, Jing-Fu
Hashimoto, Ken-ya
Article Title: Design for high-quality factor of piezoelectric-on-silicon MEMS resonators using resonant plate shape and phononic crystals
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2021 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-12-01
Date Accepted: 2021-02-24
Online publication date: 2021-03-16