Zhao, Kai
An, Yingwei
Sun, Xiaoxia
Miao, Min
Li, Zhensong
Zhao, Yudi
Article Title: Characterization of corner/edge effects of through silicon via arrays and layout optimization in 3D integrated circuits
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2021 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-10-26
Date Accepted: 2021-03-03
Online publication date: 2021-03-25