Takeyama, Mayumi B.
Yasuda, Mitsunobu
Sato, Masaru
Article Title: Structural analysis of TaWN ternary alloy film applicable to Cu orientation control
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2021 The Japan Society of Applied Physics
Publication dates
Date Received: 2020-10-22
Date Accepted: 2021-03-03
Online publication date: 2021-03-19