Spessot, Alessio
Ritzenthaler, Romain
Litta, Eugenio Dentoni
Dupuy, Emmanuel
O’Sullivan, Barry https://orcid.org/0000-0002-9036-8241
Bastos, Joao
Capogreco, Elena
Miyaguchi, Kenichi
Machkaoutsan, Vladimir
Yoon, Younggwang
Fazan, Pierre
Horiguchi, Naoto
Article Title: 80 nm tall thermally stable cost effective FinFETs for advanced dynamic random access memory periphery devices for artificial intelligence/machine learning and automotive applications
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2021 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-10-16
Date Accepted: 2021-03-03
Online publication date: 2021-03-24