Saito, Koga https://orcid.org/0000-0002-4356-0345
Yoshida, Ayano
Kuroda, Rihito https://orcid.org/0000-0001-7812-3084
Shibata, Hiroshi
Shibaguchi, Taku
Kuriyama, Naoya
Sugawa, Shigetoshi
Article Title: High capacitance density highly reliable textured deep trench SiN capacitors toward 3D integration
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2021 The Japan Society of Applied Physics
Publication dates
Date Received: 2020-10-16
Date Accepted: 2021-03-05
Online publication date: 2021-03-29