Goto, Ken https://orcid.org/0000-0002-3371-0020
Ikenaga, Kazutada https://orcid.org/0000-0002-0755-5872
Tanaka, Nami
Ishikawa, Masato
Machida, Hideaki
Kumagai, Yoshinao https://orcid.org/0000-0001-8475-9468
Funding for this research was provided by:
Tokyo University of Agriculture and Technology
Japan Society for the Promotion of Science (16H06417)
Article Title: Thermodynamic and experimental studies of β-Ga2O3 growth by metalorganic vapor phase epitaxy
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2021 The Author(s). Published on behalf of The Japan Society of Applied Physics by IOP Publishing Ltd
Publication dates
Date Received: 2021-02-15
Date Accepted: 2021-03-07
Online publication date: 2021-03-29