Sakakibara, Soma
Chokawa, Kenta
Araidai, Masaaki
Kusaba, Akira https://orcid.org/0000-0002-1296-9180
Kangawa, Yoshihiro https://orcid.org/0000-0002-4982-8883
Shiraishi, Kenji https://orcid.org/0000-0001-5641-6986
Funding for this research was provided by:
“Program for research and development of next-generation semiconductor to realize energy-saving society”
the Ministry of Education, Culture, Sports, Science, and Technology, Japan, under the research project “Promoting Research on the Supercomputer Fugaku”
Article Title: Theoretical study on the effect of H 2 and NH 3 on trimethylgallium decomposition process in GaN MOVPE
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2021 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2021-01-31
Date Accepted: 2021-03-19
Online publication date: 2021-04-08