Watanabe, Kaname
Utsumi, Jun
Takigawa, Ryo
Article Title: Bonding of LiNbO3 and Si wafers at room temperature using Si nanolayers
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2021 The Japan Society of Applied Physics
Publication dates
Date Received: 2020-12-16
Date Accepted: 2021-03-29
Online publication date: 2021-04-20