Lv, Xinrui
Chai, Xin
Lv, Lin
Cao, Yunzhen
Zhang, Yuzhi
Song, Lixin
Article Title: Preparation of porous Mo-doped VO 2 films via atomic layer deposition and post annealing
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2021 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2021-03-31
Date Accepted: 2021-06-30
Online publication date: 2021-07-16