Hara, Yuki
Mohit, https://orcid.org/0000-0003-1702-9427
Murakami, Tatsuya
Migita, Shinji
Ota, Hiroyuki
Morita, Yukinori https://orcid.org/0000-0002-2666-6762
Tokumitsu, Eisuke
Article Title: Impact of reduced pressure crystallization on ferroelectric properties in hafnium-zirconium dioxide films deposited by sputtering
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2021 The Author(s). Published on behalf of The Japan Society of Applied Physics by IOP Publishing Ltd
Publication dates
Date Received: 2021-06-03
Date Accepted: 2021-07-07
Online publication date: 2021-07-23