Ishikawa, Yukari https://orcid.org/0000-0001-8908-7592
Sugawara, Yoshihiro
Yao, Yongzhao https://orcid.org/0000-0002-7746-4204
Noguchi, Naoto
Takeda, Yukihisa
Yamada, Hisashi https://orcid.org/0000-0001-7850-9964
Shimizu, Mitsuaki
Tadatomo, Kazuyuki
Funding for this research was provided by:
Japan Society for the Promotion of Science (20K05176)
“Knowledge Hub Aichi” Priority Research Project from Aichi Prefectural Government III
Kazuchika Okura Memorial Foundation
Article Title: Generation of dislocations from scratches on GaN formed during wafer fabrication and dislocation reactions during homoepitaxial growth
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2021 The Japan Society of Applied Physics
Publication dates
Date Received: 2021-08-04
Date Accepted: 2021-09-27
Online publication date: 2021-10-11