Okada, Narihito
Sakamoto, Ryota
Ataka, Kazuya
Ito, Tadatoshi
Matsumura, Wataru
You, Lu
Yao, Yongzhao https://orcid.org/0000-0002-7746-4204
Ishikawa, Yukari https://orcid.org/0000-0001-8908-7592
Tadatomo, Kazuyuki
Funding for this research was provided by:
NEDO Feasibility Study Program
Ube Industries Foundation
The Fujikura Foundation
Article Title: Deep ultraviolet emission from multiple quantum wells on flat N-polar AlN templates fabricated using periodical pulsed H2 etching
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2021 The Japan Society of Applied Physics
Publication dates
Date Received: 2021-05-17
Date Accepted: 2021-10-10
Online publication date: 2021-11-10