Inada, Yuhi https://orcid.org/0000-0001-8524-2874
Yamashita, Shusuke
Murakami, Shuya
Takahashi, Kazuo https://orcid.org/0000-0003-1223-1263
Yamao, Takeshi
Hotta, Shu
Funding for this research was provided by:
Japan Society for the Promotion of Science (Grant-in-Aid for Scientific Research (B) / No. 15H)
Article Title: Direct fabrication of a diffraction grating onto organic oligomer crystals by focused ion beam lithography followed by plasma etching
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2021 The Japan Society of Applied Physics
Publication dates
Date Received: 2021-08-26
Date Accepted: 2021-10-25
Online publication date: 2021-12-02