Haruyama, Yuichi
Morimoto, Daiki
Heya, Akira
Sumitomo, Koji http://orcid.org/0000-0001-8785-7290
Ito, Seigo
Yokota, Kumiko
Tagawa, Masahito
Article Title: Effect of atomic hydrogen exposure on hydrogenated amorphous carbon thin films
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2021 The Japan Society of Applied Physics
Publication dates
Date Received: 2021-09-01
Date Accepted: 2021-11-02
Online publication date: 2021-11-22