Nishio, Johji https://orcid.org/0000-0002-9691-2308
Ota, Chiharu https://orcid.org/0000-0002-7359-0983
Iijima, Ryosuke
Article Title: Structural study of single Shockley stacking faults terminated near substrate/epilayer interface in 4H-SiC
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2022 The Japan Society of Applied Physics
Publication dates
Date Received: 2021-09-20
Date Accepted: 2021-11-16
Online publication date: 2022-02-07