Liu, Baiyin
Xu, Fujun https://orcid.org/0000-0002-0751-6566
Wang, Jiaming
Lang, Jing
Zhang, Na
Fang, Xuzhou
Wang, Liubing
Yang, Xuelin https://orcid.org/0000-0001-5152-5075
Kang, Xiangning
Wang, Xinqiang
Qin, Zhixin
Ge, Weikun
Shen, Bo
Funding for this research was provided by:
the National Key Research and Development Program of China (Nos. 2016YFB0400101)
National Natural Science Foundation of China (Nos. 61674009)
the Key-Area Research and Development Program of Guangdong Province (No. 2020B010172001)
Major Scientific and Technological Innovation Project (MSTIP) of Shandong Province (No. 2019JZZY010209)
Article Title: High quality AlN with uniform in-plane strain on nano-patterned AlN templates achieved by preset strain modulation
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2021 The Japan Society of Applied Physics. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2021-11-05
Date Accepted: 2021-11-16
Online publication date: 2021-12-02