Sato, Takuma http://orcid.org/0000-0002-2213-3117
Hanafusa, Hiroaki http://orcid.org/0000-0002-4641-4968
Higashi, Seiichiro
Article Title: Investigation on electrical characteristics of TFTs fabricated with germanium films crystallized by atmospheric-pressure micro thermal plasma jet irradiation
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2022 The Japan Society of Applied Physics
Publication dates
Date Received: 2021-09-30
Date Accepted: 2021-11-24
Online publication date: 2022-02-09